Helium Ion Microscope Orion from Zeiss
ELPHY MultiBeam Pattern Generator from Raith https://raith.com/product/elphy/
Excimer lamps are ultraviolet lamps that are designed to emit UV wavelengths in the range of approximately 170 nanometers (nm) to 230 nm, dependent upon noble gas excimers present. Excimer lamps are useful in many applications, such as UVC sterilization, ozone generation, and UV curing processes